WebImproved performance thin-film plate acoustic wave resonators (FPAR) using the lowest order symmetric Lamb wave (S0) propagating in highly textured AlN membranes are … WebJan 5, 2024 · In this paper, we propose the design of a dual-mode Lamb wave resonator (DLWR) and a RF dual-passband filter based on DLWRs. The DLWR consists of a piezoelectric film and two IDT arrays with different thicknesses. Moreover, DLWRs with four different electrode configurations are analyzed.
On‐chip terahertz whispering gallery mode resonator with high‐Q …
Webmechanical-systems resonator with coexisting S0andS1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor k2 t foraresonatorand low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In par- WebSiddiqi, M.W.U.; Lee, J.E.-Y. Quality Factor Enhancement of AlN-on-Si Lamb Wave Resonators Using a Hybrid of Phononic Crystal Shapes in Anchoring Boundaries. In … floating thermometer homebrew
AlN MEMS Resonator with High Quality Factor - IEEE Xplore
WebJul 14, 2024 · The fabricated resonator shows a 2nd-order symmetric (S2) resonance at 3.05 GHz with a high quality factor (Q) of 657, and a large k2 of 21.5% and a 6th-order symmetric (S6) resonance at 9.05 GHz with a high Q of 636 and a k2 of 3.71%, both among the highest demonstrated for higher-order Lamb wave devices. WebJun 1, 2024 · This study reports a novel AlN Lamb wave resonator (LWR) with anti-resonance quality factor (Qa) as high as 4,021 for the first time, indicating an ultra-low acoustic loss. Conventionally, resonance quality factor (Qr) is widely studied and used for various comparisons. WebJan 31, 2024 · This work presents a novel ultra-high frequency Lamb mode Aluminum nitride piezoelectric resonator with enhanced quality factors ( Q ). With slots introduced in the … great lakes christian women\u0027s basketball